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Titlebook: Crucial Issues in Semiconductor Materials and Processing Technologies; S. Coffa,F. Priolo,J. M. Poate Book 1992 Springer Science+Business

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发表于 2025-3-21 18:52:39 | 显示全部楼层 |阅读模式
书目名称Crucial Issues in Semiconductor Materials and Processing Technologies
编辑S. Coffa,F. Priolo,J. M. Poate
视频video
丛书名称NATO Science Series E:
图书封面Titlebook: Crucial Issues in Semiconductor Materials and Processing Technologies;  S. Coffa,F. Priolo,J. M. Poate Book 1992 Springer Science+Business
描述Semiconductors lie at the heart of some of the most importantindustries and technologies of the twentieth century. The complexityof silicon integrated circuits is increasing considerably because ofthe continuous dimensional shrinkage to improve efficiency andfunctionality. This evolution in design rules poses real challengesfor the materials scientists and processing engineers. Materials,defects and processing now have to be understood in their totality.World experts discuss, in this volume, the crucial issues facinglithography, ion implication and plasma processing, metallization andinsulating layer quality, and crystal growth. Particular emphasis isplaced upon silicon, but compound semiconductors and photonicmaterials are also highlighted. The fundamental concepts of phasestability, interfaces and defects play a key role in understandingthese crucial issues. These concepts are reviewed in a crucialfashion. .
出版日期Book 1992
关键词Transistor; complexity; field-effect transistor; integrated circuit; metal oxide semiconductur field-eff
版次1
doihttps://doi.org/10.1007/978-94-011-2714-1
isbn_softcover978-94-010-5203-0
isbn_ebook978-94-011-2714-1Series ISSN 0168-132X
issn_series 0168-132X
copyrightSpringer Science+Business Media Dordrecht 1992
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发表于 2025-3-21 20:48:45 | 显示全部楼层
Optoelectronic Materialsd to alloys. An insight is given on recent developments: strained epilayers and quantum wells. We then review the materials of interest for optoelectronic devices and detail those related to telecommunication applications, especially the InGaAsP and InGaAlAs quaternary systems.
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Electrical Characteristics of PECVD Silicon Nitride / Compound Semiconductor Interfaces for Optoelecrmal annealing in nitrogen were also shown. The experimental data can be interpreted in terms of the contributions of insulator-related structural defects and semiconductor-related defects induced by the plasma deposition process on the crystal surface.
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Fundamentals of Semiconductor Processing defining the ultimate limits in feature size, compositional and structural heterogeneity, and device performance. Particular emphasis is given to silicon technology which dominates both the science and economics of the electronics industry.
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Paul Humphries,Alison J. King,John D. Koehnamination. The nature of those defects, their electrical effects, their formation mechanisms and precautions for their prevention are discussed. Analytical methods for the characterization and monitoring of crystal defects and metal contamination are described.
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Fourier and Fourier-Mehler Transforms, has been considered for two new applications : i) Formation of ultra-shallow junctions in silicon using selectively deposited and implanted polycrystalline Si.Ge. as a diffusion source, ii) Formation of MOS gate structures with Si.Ge. gate electrodes for lower dopant activation temperatures and better threshold control.
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Defect Aspects of Advanced Device Technologiesamination. The nature of those defects, their electrical effects, their formation mechanisms and precautions for their prevention are discussed. Analytical methods for the characterization and monitoring of crystal defects and metal contamination are described.
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