书目名称 | Crucial Issues in Semiconductor Materials and Processing Technologies | 编辑 | S. Coffa,F. Priolo,J. M. Poate | 视频video | | 丛书名称 | NATO Science Series E: | 图书封面 |  | 描述 | Semiconductors lie at the heart of some of the most importantindustries and technologies of the twentieth century. The complexityof silicon integrated circuits is increasing considerably because ofthe continuous dimensional shrinkage to improve efficiency andfunctionality. This evolution in design rules poses real challengesfor the materials scientists and processing engineers. Materials,defects and processing now have to be understood in their totality.World experts discuss, in this volume, the crucial issues facinglithography, ion implication and plasma processing, metallization andinsulating layer quality, and crystal growth. Particular emphasis isplaced upon silicon, but compound semiconductors and photonicmaterials are also highlighted. The fundamental concepts of phasestability, interfaces and defects play a key role in understandingthese crucial issues. These concepts are reviewed in a crucialfashion. . | 出版日期 | Book 1992 | 关键词 | Transistor; complexity; field-effect transistor; integrated circuit; metal oxide semiconductur field-eff | 版次 | 1 | doi | https://doi.org/10.1007/978-94-011-2714-1 | isbn_softcover | 978-94-010-5203-0 | isbn_ebook | 978-94-011-2714-1Series ISSN 0168-132X | issn_series | 0168-132X | copyright | Springer Science+Business Media Dordrecht 1992 |
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