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Titlebook: Chemical Processing with Lasers; Dieter Bäuerle Textbook 19861st edition Springer-Verlag Berlin Heidelberg 1986 laser.metals.optics.semico

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书目名称Chemical Processing with Lasers
编辑Dieter Bäuerle
视频video
丛书名称Springer Series in Materials Science
图书封面Titlebook: Chemical Processing with Lasers;  Dieter Bäuerle Textbook 19861st edition Springer-Verlag Berlin Heidelberg 1986 laser.metals.optics.semico
描述Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a
出版日期Textbook 19861st edition
关键词laser; metals; optics; semiconductor; thin films
版次1
doihttps://doi.org/10.1007/978-3-662-02505-5
isbn_ebook978-3-662-02505-5Series ISSN 0933-033X Series E-ISSN 2196-2812
issn_series 0933-033X
copyrightSpringer-Verlag Berlin Heidelberg 1986
The information of publication is updating

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0933-033X anufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not
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Pareto optimality in microeconomicsntional chemical vapor deposition (CVD) [9.1–4]; plasma processing, either deposition (PCVD) or etching (PE) [9.3,4]; electron beam (EB) processing [9.3–5]; ion beam processing, for example, reactive ion etching (RIE) [9.3,4]; photochemical processing with lamps [9.3,4], etc.
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Introduction, mechanisms within the particular system under investigation. The combination of all of these properties offers a wide and versatile range of quite different applications. The fundamentals regarding the generation and properties of laser light and the various types of lasers have already been extensively reviewed (see, for example, [1.1–5]).
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Fundamental Excitation Mechanisms,f the solid material (substrate) to be processed. In many cases the different mechanisms and possibilities of excitation contribute simultaneously to the reaction, but often one of them dominates. There are also many examples where, for example, a reaction is initiated photolytically and proceeds pyrolytically, or vice versa.
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Comparison of Processing Techniques, Applications of Laser Chemical Processing,ntional chemical vapor deposition (CVD) [9.1–4]; plasma processing, either deposition (PCVD) or etching (PE) [9.3,4]; electron beam (EB) processing [9.3–5]; ion beam processing, for example, reactive ion etching (RIE) [9.3,4]; photochemical processing with lamps [9.3,4], etc.
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