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Titlebook: Chemical Processing with Lasers; Dieter Bäuerle Textbook 19861st edition Springer-Verlag Berlin Heidelberg 1986 laser.metals.optics.semico

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Introduction, linked to the inherent properties of laser light: its coherence and its monochromaticity. Its spatial coherence permits extreme focusing and directional irradiation at high energy densities. The monochromaticity of laser light, together with its tunability, opens up the possibility of highly select
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Laser-Induced Chemical Reactions,erfaces. In LCP, homogeneously activated reactions are induced near substrate surfaces with the laser beam at parallel incidence (see Fig.4.3). The photoproducts that diffuse to the substrate surface may give rise to extended thin film deposition (Sect.5.3), or to . etching of the material surface (
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Experimental Techniques,ps for laser microchemical and large-area chemical processing. Section 4.2 comments on lasers that are typically used in LCP. Techniques of measuring deposition and etch rates are outlined in Sect.4.3. Section 4.4 briefly describes different possibilities of in situ temperature measurements.
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Material Deposition,wn schematically in Fig.3.1. Table 5.1 summarizes data on the elements and compounds that have so far been deposited. Additional information on the physical and chemical properties of oxides and nitrides deposited from the gas phase is listed in Tables 5.2–4. Surface modifications such as surface ox
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Surface Modifications, (including photofragments) of the adjacent medium either directly combine with atoms or molecules within the solid surface, or they simply diffuse into this surface. Another type of surface modification is the laser-induced depletion of a particular component of the surface, without appreciable etc
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Alloying, Compound Formation,e layers consisting of appropriate proportions of the elements. The chapter does not include the deposition of compound materials and of alloys from the gas and liquid phases, which has already been outlined in Chap.5. Also, oxide formation and surface doping were discussed in Chap.6.
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Etching, Cutting, Drilling,s already indicated for the model systems shown in Fig.3.1, where in some cases the course of the reaction can be turned around by simply shifting the chemical equilibrium to the other side or, as in laser-enhanced electrochemical processing, by changing the polarity of the substrate with respect to
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Comparison of Processing Techniques, Applications of Laser Chemical Processing,tion, metallization, doping, compound formation and etching are needed in many areas of technology such as mechanics, electronics, integrated optics and chemical technology. In virtually all of these fields LCP offers new and unique processing possibilities, which are impossible with currently avail
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Laser-Induced Chemical Reactions,and heterogeneous laser-induced chemical reactions may be activated both pyrolytically and/or photolytically, depending on the interaction mechanisms discussed in Chap.2. Nevertheless, the reaction rates and pathways can be quite different for homogeneous and heterogeneous reactions. In part this or
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