Titlebook: Chemical Processing with Lasers; Dieter Bäuerle Textbook 19861st edition Springer-Verlag Berlin Heidelberg 1986 laser.metals.optics.semico

Statins

Material Deposition,minary. This limitation applies not only to the deposition rates but also to the purity and stoichiometry of the materials. A brief glance at Table 5.1 shows that most of the investigations have concentrated on laser-induced deposition from the gas phase, henceforth abbreviated as LCVD. Liquid-phase

附录

Etching, Cutting, Drilling,ase molecules, adsorbate-surface complexes and/or the substrate surface itself. To separate single mechanisms, etching at normal and parallel incidence may be studied. Another type of laser-induced materials removal that is also included in this chapter is laser-induced ablative photodecomposition (

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0933-033X materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a 978-3-662-02505-5Series ISSN 0933-033X Series E-ISSN 2196-2812

COMA

Advanced Methods of Structural Analysisand heterogeneous laser-induced chemical reactions may be activated both pyrolytically and/or photolytically, depending on the interaction mechanisms discussed in Chap.2. Nevertheless, the reaction rates and pathways can be quite different for homogeneous and heterogeneous reactions. In part this or

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Kinematical Analysis of Structuresminary. This limitation applies not only to the deposition rates but also to the purity and stoichiometry of the materials. A brief glance at Table 5.1 shows that most of the investigations have concentrated on laser-induced deposition from the gas phase, henceforth abbreviated as LCVD. Liquid-phase

adulterant

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Textbook 19861st editionfacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a

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https://doi.org/10.1007/978-1-4419-1047-9 linked to the inherent properties of laser light: its coherence and its monochromaticity. Its spatial coherence permits extreme focusing and directional irradiation at high energy densities. The monochromaticity of laser light, together with its tunability, opens up the possibility of highly select

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General Theory of Influence Linesinto those which are governed by . pyrolytic (photothermal) or by . photolytic (photochemical) processes. We shall call a reaction pyrolytic if the thermalization of the laser excitation is fast compared to the reaction, and photolytic if this is not the case, i.e. when the constituents of the react

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Advanced Methods of Structural Analysiserfaces. In LCP, homogeneously activated reactions are induced near substrate surfaces with the laser beam at parallel incidence (see Fig.4.3). The photoproducts that diffuse to the substrate surface may give rise to extended thin film deposition (Sect.5.3), or to . etching of the material surface (