Overview: Presents basic modeling and simulation tools for quantitative description of thin film morphological evolution.Displays clear conceptual developments in the fundamental understanding of complex surfacThin?lmdepositionisthemostubiquitousandcriticaloftheprocessesusedto manufacture high-tech devices such as microprocessors, memories, solar cells, microelectromechanicalsystems(MEMS),lasers,solid-statelighting,andp- tovoltaics. The morphology and microstructure of thin ?lms directly controls their optical, magnetic, and electrical properties, which are often signi?cantly di?erent from bul
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