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Titlebook: Simulation of Semiconductor Processes and Devices 2001; SISPAD 01 Dimitris Tsoukalas,Christos Tsamis Conference proceedings 2001 Springer-V

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A. Burenkov,Y. Mu,H. Rysselbes, und die dritte Störungen der Modellierung und der Knochendichte enthält. Beispiele der Gruppen 1–3 sind: die Achondroplasie (1), Multiple kartilaginäre Exostosen (2), Osteogenesis imperfecta (3). Zu den Dysostosen werden Phokomelien, die angeborenen Verbiegungen der langen Röhrenknochen, die Po
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F. G. Lau,W. Molzerbes, und die dritte Störungen der Modellierung und der Knochendichte enthält. Beispiele der Gruppen 1–3 sind: die Achondroplasie (1), Multiple kartilaginäre Exostosen (2), Osteogenesis imperfecta (3). Zu den Dysostosen werden Phokomelien, die angeborenen Verbiegungen der langen Röhrenknochen, die Po
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and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices.978-3-7091-7278-0978-3-7091-6244-6
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On the Effect of Local Electronic Stopping on Ion Implantation Profiles in Non-Crystalline Targets,ced diffusion during ion implantation, deficiency of the physical model for ion-atomic interaction. The high accuracy of the measurements and the fact that the observed profile broadening is independent of the chemical nature of the target atoms and ions speaks in favour of the last assumption about
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Conference proceedings 2001tion chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices.
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Macroscopic Quantum Carrier Transport Modeling, to including quantum mechanical (QM) effects in carrier transport. In this paper, we report a five-equation PDE system (reduced to three-equation at thermal equilibrium) which preserves the numerical stability of classical drift-diffusion (DD) model, yet faithfully manifests QM corrections. Tunneli
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Atomistic Front-End Process Modelling: A Powerful Tool for Deep-Submicron Device Fabrication, last few years, atomistic Kinetic Monte Carlo has proven to be a new way to tackle the problems that arise as device dimension shrink into the deep submicron regime. We present some encouraging results of exploring the capabilities of this new process modelling approach.
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The Role of Incomplete Interstitial-Vacancy Recombination on Silicon Amorphization, show that accumulation of interstitial-vacancy pairs in concentrations of 25% and above lead to homogeneous amorphization. We identify very stable defect structures, consisting of the combination of the pair and Si self-interstitials, which form when there is an excess of interstitials or by incomp
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