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Titlebook: Silicon Sensors and Actuators; The Feynman Roadmap Benedetto Vigna,Paolo Ferrari,Sarah Zerbini Book 2022 Springer Nature Switzerland AG 202

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Linear and Nonlinear Mechanics in MEMS met in the study, design, and use of Microsystems: oscillators in resonant accelerometers with hardening and softening effects, also induced by coupling with electrical and thermal phenomena, micromirrors showing no nonlinear responses, resonators. Many peculiar, nonstandard, nonlinear phenomena ar
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Inertial Sensorse described in the second part of this section..Specific flavors of THELMA technology aiming at performance improvement and die area shrinkage are described in the following part of Sect. ., such as THELMA-60 with increased structural layer thickness to 60 micron in order to increase accelerometer p
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Magnetometersude devices based on Hall effect, magnetoresistance (AMR, TMR, and GMR), magnetoinductance, Lorentz force, and fluxgates. In the following paragraphs, different structures for magnetic sensing will be described, in particular, Anisotropic Magnetoresistance (AMR), as well as the key parameters in AMR
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Book 2022ing of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book..
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