书目名称 | Silicon Sensors and Actuators | 副标题 | The Feynman Roadmap | 编辑 | Benedetto Vigna,Paolo Ferrari,Sarah Zerbini | 视频video | | 概述 | Provides a systematic overview of sensor and actuator technology.Written by industry thought leaders and technical experts from STMicroelectronics.Introduces the ‘’Feynman Roadmap’’ to the future of s | 图书封面 |  | 描述 | .This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.. | 出版日期 | Book 2022 | 关键词 | Actuators; Electronic Interfaces; Fabrication; Mechanical Material; MEMS; Micro Mechanical Transducers; Mi | 版次 | 1 | doi | https://doi.org/10.1007/978-3-030-80135-9 | isbn_softcover | 978-3-030-80137-3 | isbn_ebook | 978-3-030-80135-9 | copyright | Springer Nature Switzerland AG 2022 |
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