Titlebook: Silicon Anodization as a Structuring Technique; Literature Review, M Alexey Ivanov Book 2018 Springer Fachmedien Wiesbaden GmbH 2018 electr

建筑物的正面

书目名称Silicon Anodization as a Structuring Technique影响因子(影响力)




书目名称Silicon Anodization as a Structuring Technique影响因子(影响力)学科排名




书目名称Silicon Anodization as a Structuring Technique网络公开度




书目名称Silicon Anodization as a Structuring Technique网络公开度学科排名




书目名称Silicon Anodization as a Structuring Technique被引频次




书目名称Silicon Anodization as a Structuring Technique被引频次学科排名




书目名称Silicon Anodization as a Structuring Technique年度引用




书目名称Silicon Anodization as a Structuring Technique年度引用学科排名




书目名称Silicon Anodization as a Structuring Technique读者反馈




书目名称Silicon Anodization as a Structuring Technique读者反馈学科排名

名字

State of the art,erial for research for more than half a century. The first report on anodization of silicon (and germanium) was published by Uhlir [78]. Further investigations of silicon anodization were performed ten years later by Memming and Schwandt [79].

草率男

ironic

BROTH

https://doi.org/10.1007/978-3-658-19238-9electrochemical etching; microsystems; FEM simulation; microstructuring; sacrificial layer; electropolish

N防腐剂

Experimental, characterization and simulation methods,Preparation of electrolytes was done mostly on the day of experiments or one day before. Before starting experiments, electrolyte was stirred manually to provide good homogeneity. During anodization, no stirring/circulation was applied.

Cumbersome

General conclusions,In this work, application of silicon anodization process as a threedimensional structuring technique was investigated.

等级的上升

overhaul

978-3-658-19237-2Springer Fachmedien Wiesbaden GmbH 2018

DRILL