Titlebook: Scanning Probe Lithography; Hyongsok T. Soh,Kathryn Wilder Guarini,Calvin F. Q Book 2001 Springer Science+Business Media New York 2001 Lei

知识

Introduction to Scanning Probe Lithography,d features in photosensitive polymers. Since photolithography is rapidly approaching fundamental resolution limitations, a new high-resolution patterning technique may be required to continue the industry’s trend toward higher performance electron devices, increased packing densities, and higher density memories.

Culmination

Scanning Probe Tips for SPL,ent, the tips should be tall to ensure a small cantilever-to-sample capacitance. In this chapter we give details on different tip varieties: (1) “standard” silicon or metal-coated tips, (2) post-processed silicon tips, and (3) carbon nanotubes as scanning probe tips.

FLING

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Microsystemshttp://image.papertrans.cn/s/image/861161.jpg

CAMP