书目名称 | Nondestructive Evaluation of Semiconductor Materials and Devices |
编辑 | Jay N. Zemel |
视频video | |
丛书名称 | NATO Science Series B: |
图书封面 |  |
描述 | From September 19-29, a NATO Advanced Study Institute on Non destructive Evaluation of Semiconductor Materials and Devices was held at the Villa Tuscolano in Frascati, Italy. A total of 80 attendees and lecturers participated in the program which covered many of the important topics in this field. The subject matter was divided to emphasize the following different types of problems: electrical measurements; acoustic measurements; scanning techniques; optical methods; backscatter methods; x-ray observations; accele rated life tests. It would be difficult to give a full discussion of such an Institute without going through the major points of each speaker. Clearly this is the proper task of the eventual readers of these Proceedings. Instead, it would be preferable to stress some general issues. What came through very clearly is that the measurements of the basic scientists in materials and device phenomena are of sub stantial immediate concern to the device technologies and end users. |
出版日期 | Book 1979 |
关键词 | material; materials; measurement; scanning; semiconductor; stress; X-ray |
版次 | 1 |
doi | https://doi.org/10.1007/978-1-4757-1352-7 |
isbn_softcover | 978-1-4757-1354-1 |
isbn_ebook | 978-1-4757-1352-7Series ISSN 0258-1221 |
issn_series | 0258-1221 |
copyright | Springer Science+Business Media New York 1979 |