Titlebook: Nanopositioning Technologies; Fundamentals and App Changhai Ru,Xinyu Liu,Yu Sun Book 2016 Springer International Publishing Switzerland 201

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Book 2016c actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotech

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,A Review of Stick–Slip Nanopositioning Actuators,sidered as a framework to further classify other PSTAs. In addition, the applications of PSTAs are categorized into two groups according to the number of degrees of freedom (DOF). This chapter also discusses driving signals to actuate different structures of PSTAs and control methods to achieve high positioning resolutions.

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Position Sensors for Nanopositioning,econd goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric, and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy-current sensors; linear variable displacement transformers; interferometers; and linear encoders.

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MEMS Nanopositioners,uired to reach this level. As a result, nanopositioner designs typically use a flexure mechanism to guide the motion of the stage, which exhibit no friction since the motion is based on structural bending, thereby providing continuous smooth movements.