书目名称 | Nanopositioning Technologies | 副标题 | Fundamentals and App | 编辑 | Changhai Ru,Xinyu Liu,Yu Sun | 视频video | | 概述 | Enriches understanding of the latest fundamentals and applications of nanopositioning technologies.Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation u | 图书封面 |  | 描述 | This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries. | 出版日期 | Book 2016 | 关键词 | Flexure-Guided Nanopositioning; MEMS Nanopositioning; Nanomanipulation; Nanopositioning Applications; Na | 版次 | 1 | doi | https://doi.org/10.1007/978-3-319-23853-1 | isbn_softcover | 978-3-319-79539-3 | isbn_ebook | 978-3-319-23853-1 | copyright | Springer International Publishing Switzerland 2016 |
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