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Titlebook: Nanopositioning Technologies; Fundamentals and App Changhai Ru,Xinyu Liu,Yu Sun Book 2016 Springer International Publishing Switzerland 201

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发表于 2025-3-21 18:28:21 | 显示全部楼层 |阅读模式
书目名称Nanopositioning Technologies
副标题Fundamentals and App
编辑Changhai Ru,Xinyu Liu,Yu Sun
视频video
概述Enriches understanding of the latest fundamentals and applications of nanopositioning technologies.Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation u
图书封面Titlebook: Nanopositioning Technologies; Fundamentals and App Changhai Ru,Xinyu Liu,Yu Sun Book 2016 Springer International Publishing Switzerland 201
描述This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
出版日期Book 2016
关键词Flexure-Guided Nanopositioning; MEMS Nanopositioning; Nanomanipulation; Nanopositioning Applications; Na
版次1
doihttps://doi.org/10.1007/978-3-319-23853-1
isbn_softcover978-3-319-79539-3
isbn_ebook978-3-319-23853-1
copyrightSpringer International Publishing Switzerland 2016
The information of publication is updating

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