Titlebook: Micro and Nano Fabrication; Tools and Processes Hans H. Gatzen,Volker Saile,Jürg Leuthold Textbook 2015 Springer-Verlag Berlin Heidelberg 2

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978-3-662-50826-8Springer-Verlag Berlin Heidelberg 2015

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https://doi.org/10.1007/978-3-662-44395-8MEMS; MNEMS; Micro Electro-mechanical Systems; NEMS; Nano Electro-mechanical Systems; Thin-film fabricati

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Hans H. Gatzen,Volker Saile,Jürg LeutholdDescribes the tools required for fabricating MNEMS systems.Gives insight into the process technologies.Fits for practitioners and students of MNEMS.Includes supplementary material:

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ards overharvesting. Ultimately, resource extraction in Oka becomes a part of the existing bonds between humans and other sentient beings. Although in Russian official discourses Soiots are considered indigenous while Buriats are not, these divisions are problematised and challenged locally. Through

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Hans H. Gatzen,Volker Saile,Jürg Leutholdards overharvesting. Ultimately, resource extraction in Oka becomes a part of the existing bonds between humans and other sentient beings. Although in Russian official discourses Soiots are considered indigenous while Buriats are not, these divisions are problematised and challenged locally. Through

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Hans H. Gatzen,Volker Saile,Jürg Leutholdsessions and one special session with approximately ninety participants from allover the world. Thirty-six papers, invited and contributed, were presented, nine from U. S. A., three from U. S. S. R., two of each from Germany, France, India, one of each from Sweden, Canada, Belgium and fifteen from J