Titlebook: Micro and Nano Fabrication; Tools and Processes Hans H. Gatzen,Volker Saile,Jürg Leuthold Textbook 2015 Springer-Verlag Berlin Heidelberg 2

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书目名称Micro and Nano Fabrication影响因子(影响力)




书目名称Micro and Nano Fabrication影响因子(影响力)学科排名




书目名称Micro and Nano Fabrication网络公开度




书目名称Micro and Nano Fabrication网络公开度学科排名




书目名称Micro and Nano Fabrication被引频次




书目名称Micro and Nano Fabrication被引频次学科排名




书目名称Micro and Nano Fabrication年度引用




书目名称Micro and Nano Fabrication年度引用学科排名




书目名称Micro and Nano Fabrication读者反馈




书目名称Micro and Nano Fabrication读者反馈学科排名

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Vacuum Technology,gime. Typically, roughing pumps are displacement pumps, while high-vacuum pumps are either kinetic transfer pumps or entrapment pumps . General vacuum issues covered are the vacuum seal, vacuum measurement and analysis, as well as desorption and leaks. A discussion of vacuum pump applications concludes this chapter.

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f MNEMS.Includes supplementary material: .For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process te

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Textbook 2015s book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control..

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Deposition Technologies,olyte) and subjected to electrochemical or chemical deposition. Spin-coating and spray-coating are two examples of technologies that lend themselves to creating organic films—a technology widely used in depositing photoresists in photolithography. Dip processes like solgel may be used for the creation of oxide coatings.

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