| 书目名称 | Mechanical Microsensors | | 编辑 | Miko Elwenspoek,Remco Wiegerink | | 视频video | | | 概述 | Gives an overview of the physics necessary to understand, design and fabricate mechanical microsensors.Provides a guide to the relevant literature.Discusses the advantages and limitations of microtech | | 丛书名称 | Microtechnology and MEMS | | 图书封面 |  | | 描述 | This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have | | 出版日期 | Book 2001 | | 关键词 | Gauge; Sensor; deformation; design; friction; heat transfer; mechanical engineering; mechanics; mechanism; mi | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-662-04321-9 | | isbn_softcover | 978-3-642-08706-6 | | isbn_ebook | 978-3-662-04321-9Series ISSN 1615-8326 Series E-ISSN 2365-0680 | | issn_series | 1615-8326 | | copyright | Springer-Verlag Berlin Heidelberg 2001 |
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发表于 2025-3-21 18:45:22
