Titlebook: Mechanical Microsensors; Miko Elwenspoek,Remco Wiegerink Book 2001 Springer-Verlag Berlin Heidelberg 2001 Gauge.Sensor.deformation.design.

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Mechanical Microsensors978-3-662-04321-9Series ISSN 1615-8326 Series E-ISSN 2365-0680

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Introduction,tific instrumentation. Market studies in the past years (mid nineties) have predicted an enormous increase in the need of these sensors. Recent predictions on market volumes of microcomponents (besides mechanical sensors ink jet printer heads and hard disk heads) are in the range of US$100 billion annually in Europe alone (Micromachine 1998).

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Principles of Measuring Mechanical Quantities: Transduction of Deformation,endency of the capacity on the geometric arrangement of conductors, piezoelectricity, optical resonance and optical interferometry. We concentrate here on the first two, most important, transducers. For flowsensors the thermal domain is of great importance, but we shall defer the discussion of transducers using heat to the chapter on flowsensors.

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