Titlebook: MEMS: A Practical Guide of Design, Analysis, and Applications; Jan G. Korvink,Oliver Paul Book 2006 Springer-Verlag Berlin Heidelberg 2006

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MEMS and NEMS Simulation,physical effects. In reality, no single tool caters to all the needs of the MEMS community. Hence, MEMS designers carry the burden tofind theappropriate toolsand strategy for their task. Fortunately, many alternative routes exist to achieve a given goal, but some insight is needed to get the most ou

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System-Level Simulation of Microsystems,ics, and electronics. In the majority of cases, good MEMS design requires the evaluation of tradeoffs among the fabrication process, micromechanical topology, and sizing. Sensor interface circuits, signal conditioning, and feedback provide additional interactions that affect design choices. This cha

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Microsensors for Magnetic Fields,hese transducers, which measure magnetic fields in a range not less than 15 to 16 orders of magnitude and are universal in their applications, are in continuous development.This chapter discusses recent progress in the most frequently used magnetic-field microsensors and MEMS, which are perfectly co

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