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Titlebook: MEMS: A Practical Guide of Design, Analysis, and Applications; Jan G. Korvink,Oliver Paul Book 2006 Springer-Verlag Berlin Heidelberg 2006

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书目名称MEMS: A Practical Guide of Design, Analysis, and Applications
编辑Jan G. Korvink,Oliver Paul
视频video
概述Satisfies the demand for literature on analysis and design of microsystems.Deals with a wide range of industrial applications
图书封面Titlebook: MEMS: A Practical Guide of Design, Analysis, and Applications;  Jan G. Korvink,Oliver Paul Book 2006 Springer-Verlag Berlin Heidelberg 2006
描述MEMS are rapidly moving from the research laboratory to the mar­ ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabil­ ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market poten­ tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza­ tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing?
出版日期Book 2006
关键词Microelectromechanical Systems; Micromachining; Microtechnology; Reference; Sensor; Standard; microelectro
版次1
doihttps://doi.org/10.1007/978-3-540-33655-6
isbn_softcover978-3-662-56835-4
isbn_ebook978-3-540-33655-6
copyrightSpringer-Verlag Berlin Heidelberg 2006
The information of publication is updating

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Mechanical Microsensors,ablished in already-existing systems like the airbag, mainly for cost reasons, mechanical microsensors are currently enabling completely new systems that critically rely on them. One well-known example is the Electronic Stability Program (ESP) or Vehicle Dynamics Control (VDC) system, which would no
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Micromachining Technology,surface of the wafer. The 1980s saw the growth of silicon-based surface micromachining using a polysilicon mechanical layer.[.,.] In recent years, a number of new technologies have been developed using both silicon and alternative materials. These include the epi-processes where the epilayer is used
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th miniaturization market poten­ tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza­ tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? 978-3-662-56835-4978-3-540-33655-6
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MEMS: A Practical Guide of Design, Analysis, and Applications
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rlebt kein Vereinbarkeitsproblem, sondern stellt – vermittels eines Sphärengrenzen obsolet machenden Gesamtprojekts – eine extrem hohe Vereinbarkeit her. Die Kombination aus gesellschaftlich und biografisch bedingter Krisenhaftigkeit ist fallspezifisch gelagert, ebenso stellt die inhaltliche Ausrich
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