Titlebook: Ion Spectroscopies for Surface Analysis; A. W. Czanderna,David M. Hercules Book 1991 Springer Science+Business Media New York 1991 Atom.Ch

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Book 1991pplied for measuring the elemental and molecular composition of a surface. Each method has particular strengths and limitations that often are directly connected to the physical processes involved. Typically, atoms and molecules on the surface and in the near surface region may be excited by photons

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Comparisons of SIMS, SNMS, ISS, RBS, AES, and XPS Methods for Surface Compositional Analysis,ues. Detailed information on the ion spectroscopies (SIMS, SNMS, ISS, and RBS) is presented in earlier chapters of this volume; information on the electron spectroscopies can be found in the references given below and in a forthcoming volume of this series. Acronyms and abbreviations used in this chapter are defined in Chapter 1 of this volume.

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Rutherford Backscattering and Nuclear Reaction Analysis, problems. The primary advantage of these ion scattering techniques is quantitative analysis, which, in turn, results from the successful understanding of these processes by the nuclear physics community. A second main advantage is in-depth profiling in a nondestructive manner.

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s may be applied for measuring the elemental and molecular composition of a surface. Each method has particular strengths and limitations that often are directly connected to the physical processes involved. Typically, atoms and molecules on the surface and in the near surface region may be excited

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Laser Resonant and Nonresonant Photoionization of Sputtered Neutrals,shed in the intervening years.. The secondary ion mass spectrometry (SIMS) technique became popular because of its sensitivity, and also, while not experimentally trivial, it was relatively straightforward to bombard a sample with a (primary) beam of ions and examine those secondary ions directly with a mass spectrometer.

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Overview of Ion Spectroscopies for Surface Compositional Analysis,vided, so that further details about surface analysis methods can be obtained. Both the surface (i.e., the outer monolayer of atoms on a solid)and the interface (i.e., the boundary between two compositionally different solids) are included in the term “surface” as it is used in this chapter.

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Book 1991ative analysis, artifacts, quantitative analysis, applications, opportunities, and limita­ tions are discussed. The first chapter provides an overview of the role of elemental composition in surface science; compositional depth profiling; stimulation by an electric field, electrons, neutrals, or pho