Titlebook: Ion Beams in Materials Processing and Analysis; Bernd Schmidt,Klaus Wetzig Book 2013 Springer-Verlag Wien 2013 Ion Beams.Materials process

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Bernd Schmidt,Klaus WetzigOffers comprehensive treatment of the use of ion beams in material science research.Includes numerous tables, graphs and illustrations that amplify the text.Provides optimization strategies for solid-

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978-3-7091-1733-0Springer-Verlag Wien 2013

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Materials Analysis by Ion Beams,scale from nm up to μm. Ion beam-based analytical techniques concern with ion sources, ion beams, the kind and cross section of ion interaction with matter, the emerging radiation (e.g., sputtered secondary ions, scattered ions, ion-induced photon, and electron emission), and appropriate radiation detection systems.

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,Ion–Solid Interactions,used by interactions between energetic ions and solids are not only the basis for understanding of ion beam materials processing but can also be exploited by a lot of micro- and nano-analytical techniques. Therefore, some important fundamentals of ion–solid interactions will be discussed in this chapter.

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Special Ion Beam Applications in Materials Analysis Problems,echnique for larger cut areas. Furthermore, ion beams can be used for the actual near-surface or cross-section analysis of thin solid films and layers. Here the typical method of choice is secondary ion mass spectrometry (SIMS), which is a depth-profiling method with typical detection limits down to the ppm range.