Titlebook: Introduction to Focused Ion Beams; Instrumentation, The Lucille A. Giannuzzi,Fred A. Stevie Book 2005 Springer-Verlag US 2005 SIMS.instrume

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Ron Anderson,Stanley J. Klepeisty during plasma processing, extensively studied during the last two decades for SiO.. Consideration of the charging polarity has recently been recognized as one of indispensable guidelines in designing an antenna rule [11] for different devices (n- or p-channel) to prevent a yield loss [12]. In ord

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A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method,TEM specimen preparations are feasible with this technique. In addition, a technique to prepare TEM specimens from a specific site has also been developed. In this technique, an FIB system equipped with a FIB/TEM(STEM) compatible specimen holder is used for thinning of the samples, e.g., a micro-sam