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Titlebook: Introduction to Focused Ion Beams; Instrumentation, The Lucille A. Giannuzzi,Fred A. Stevie Book 2005 Springer-Verlag US 2005 SIMS.instrume

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书目名称Introduction to Focused Ion Beams
副标题Instrumentation, The
编辑Lucille A. Giannuzzi,Fred A. Stevie
视频video
概述Only text that discusses and presents the theory directly related to applications and the only one that disscusses the vast applications and techniques used in FIBs and dual platform instruments.Inclu
图书封面Titlebook: Introduction to Focused Ion Beams; Instrumentation, The Lucille A. Giannuzzi,Fred A. Stevie Book 2005 Springer-Verlag US 2005 SIMS.instrume
描述.Introduction to Focused Ion Beams. is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
出版日期Book 2005
关键词SIMS; instruments; material; microscopy; spectroscopy
版次1
doihttps://doi.org/10.1007/b101190
isbn_softcover978-1-4419-3574-8
isbn_ebook978-0-387-23313-0
copyrightSpringer-Verlag US 2005
The information of publication is updating

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Ion - Solid Interactions,materials is presented. The problems of redeposition associated with an increase in sputtering yield within a confined trench are presented. Knowledge of ion - solid interactions may be used to prepare excellent quality FIB milled surfaces.
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Focused Ion Beam Gases for Deposition and Enhanced Etch,d, selective material removal provides the capabilities for a much wider range of micromachining applications. This chapter introduces FIB material deposition and chemically enhanced material removal processes, lists some of the FIB chemical precursors in common use and discusses the parameters for their use, and presents several examples.
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the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.978-1-4419-3574-8978-0-387-23313-0
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High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy,uch as energy dispersive x-ray spectroscopy (EDS), wavelength dispersive x-ray spectroscopy (WDS), secondary ion mass spectrometry (SIMS) etc. Real time high resolution SEM imaging of the cutting and deposition process enables the researcher to perform very accurate three dimensional structural examinations and device modifications.
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