Titlebook: Handbook of Porous Silicon; Leigh Canham Reference work 20141st edition Springer International Publishing Switzerland 2014 MEMS Silicon.Po

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Leigh CanhamThe most authoritative volume on porous silicon in a generation.Contains 150 chapters of contributions from almost 100 authors from around the world.Edited by an industry luminary.Comprehensive: cover

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Macroporous Silicon, and the most significant ones are mentioned. An impressive level of control has eventually been achieved for the fabrication of regular macropore arrays of high aspect ratio, including the incorporation of intentional defects or pore-wall shaping.

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Routes of Formation for Porous Siliconions that require inexpensive mesoporous silicon in powder form. Very few techniques are currently available for creating wholly microporous silicon with pore size below 2 nm. This review summarizes, from a chronological perspective, how more than 30 fabrication routes have now been developed to create different types of porous silicon.

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Mesoporous Silicon of the correlations between the fabrication conditions by electrochemical etching and the resulting mesostructure are presented. A deeper insight into advanced fabrication methods aimed at structure improvement and microstructure design is provided.

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