Titlebook: Handbook of Porous Silicon; Leigh Canham Reference work 20141st edition Springer International Publishing Switzerland 2014 MEMS Silicon.Po

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Porous Silicon Formation by Anodizationous electrolytes and electrolyte additives (surfactants, oxidizers, and other types), methods for tuning porosity, process control and natural variability, different electrode materials, and the requirements for maintaining health and safety.

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Porous Silicon Formation by Porous Silica Reductionoute. The range of different silica feedstocks utilized to date is surveyed, as is the morphology of the porous silicon structures achieved. Key technical challenges are then highlighted and alternative reduction chemistries mentioned.

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Pore Volume (Porosity) in Porous Siliconspecific physical forms, and a conversion table is provided between porosity, pore volume (void content per unit weight), and bulk density in air. Finally ten applications are given which exploit medium to high (25–95 %) porosity, or the ability to vary porosity significantly within a given structure.

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Porous Silicon Membranesosity. A variety of applications have been explored for both macroporous and mesoporous membranes and these are also surveyed. Wholly microporous membranes in silicon, where all pores have diameters less than 2 nm, have not been achieved to date.