Titlebook: Emerging Technologies for In Situ Processing; Daniel J. Ehrlich,Van Tran Nguyen (Director) Book 1988 Martinus Nijhoff Publishers, Dordretc

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Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks,arrangement is shown in Fig. 1. The X-ray radiation is provided by BESSY, the .erlin .lectron .torage ring for .nchrotron radiation. Synchrotron radiation is nearly parallel and is emitted by a well-defined electron beam. A proximity gap between mask and wafer protects the mask against mechanical damage.

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0168-132X Overview: 978-94-010-7130-7978-94-009-1409-4Series ISSN 0168-132X

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NATO Science Series E:http://image.papertrans.cn/e/image/308423.jpg

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Kulturwandel hin zum New Work Konzept,Silicon transistors have evolved into integrating circuits starting from discrete devices over twenty years ago. The similar evolution will occur in compound semiconductor optoelectronic devices, like lasers or photodetectors. The same benefits, high performance and low cost will be also expected by such integration of optoelectronic devices.

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https://doi.org/10.1007/978-3-642-96008-6Connecting both sides of a silicon substrate has direct applications in the fabrication of multilevel packaging, interconnection networks and many microelectronic components and devices.

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Siqi Ding,Xinyue Wang,Baoguo HanWe use a novel technique to amplify small increases in the oxidation rate of laser irradiated silicon to successfully isolate a photonic contribution to the reaction induced by cw argon laser radiation. This method presents clear evidence of optical enhancement over the usual thermally induced growth rate.

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