| 书目名称 | Emerging Technologies for In Situ Processing |
| 编辑 | Daniel J. Ehrlich,Van Tran Nguyen (Director) |
| 视频video | http://file.papertrans.cn/309/308423/308423.mp4 |
| 丛书名称 | NATO Science Series E: |
| 图书封面 |  |
| 出版日期 | Book 1988 |
| 关键词 | Phase; Wafer; X-Ray; development; laser; liquid; manufacturing; semiconductor devices; semiconductors; thin f |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-94-009-1409-4 |
| isbn_softcover | 978-94-010-7130-7 |
| isbn_ebook | 978-94-009-1409-4Series ISSN 0168-132X |
| issn_series | 0168-132X |
| copyright | Martinus Nijhoff Publishers, Dordretch. 1988 |