| 书目名称 | Electrical Atomic Force Microscopy for Nanoelectronics |
| 编辑 | Umberto Celano |
| 视频video | |
| 概述 | Comprehensive treatment of emerging devices, their operation and characterization.Authors provide a balance of industry and academic expertise.Includes images of state-of-the-art integrated devices.Co |
| 丛书名称 | NanoScience and Technology |
| 图书封面 |  |
| 描述 | .The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changedby the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible. . |
| 出版日期 | Book 2019 |
| 关键词 | Atomic Force Microscope; Nanoscale materials analysis; VLSI metrology; Nanoelectronic materials; Nanoele |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-030-15612-1 |
| isbn_softcover | 978-3-030-15614-5 |
| isbn_ebook | 978-3-030-15612-1Series ISSN 1434-4904 Series E-ISSN 2197-7127 |
| issn_series | 1434-4904 |
| copyright | Springer Nature Switzerland AG 2019 |
发表于 2025-3-21 16:22:23
