Titlebook: Computer Vision for Electronics Manufacturing; L. F. Pau Book 1990 Plenum Press, New York 1990 Sensor.Signal.Wafer.algorithms.circuit.comp

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Imaging Microscopes for MicroelectronicsVarious types of microscopes are used in microelectronics. These differ in the illumination fields used (vertical, oblique, darkfield, interferential, differential), light sources, iris and diaphragms, and filters (see Tables 6 and 7).

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Wafer InspectionWafer inspection involves wafer flatness measurements, wafer surface and probe mark inspection, and critical dimension measurement. Wafer inspection also collects data on variables essential to microlithographic process control and relates to CAD (Figure 57). The alternative imaging methods used are:

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CRAFT

Knowledge-Based Printed Circuit Board ManufacturingIn this chapter, the printed circuit board manufacturing tasks (Figure 116) where artificial intelligence (AI) could be or is applied are examined. In order for such tasks to be considered suited to the application of knowledge-based techniques (Chapter 8), the following conditions should be met:

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978-1-4612-7841-2Plenum Press, New York 1990

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Advances in Computer Vision and Machine Intelligencehttp://image.papertrans.cn/c/image/234079.jpg