Titlebook: Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses; Fundamental Mechanis Christopher L. Borst,Wil

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,Low-κ Interlevel Dielectrics,atibility of each material with copper metal and barrier materials. More generally, the acceptability of a material, whether dense or nanoporous, is determined by the chemical, mechanical, thermal and electric properties exhibited, as well as integration issues with IC processing requirements.

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hypotension

the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such mater

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Nahla Al Anqodi,Ruqaiya Moosa Al Balushievel and increases as the number of metal layers increases. CMP is the process of physically removing material from places of high topography to flatten and level the wafer surface. Figure 3.1 depicts nonplanarity increasing as metal layers increase, while Figure 3.2 depicts the ideal case of planar interconnect layers allowed by CMP.

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Chemical-Mechanical Planarization (CMP),evel and increases as the number of metal layers increases. CMP is the process of physically removing material from places of high topography to flatten and level the wafer surface. Figure 3.1 depicts nonplanarity increasing as metal layers increase, while Figure 3.2 depicts the ideal case of planar interconnect layers allowed by CMP.

幻影

Book 2002ion of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials durin

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Zusammenfassung und Implikationen,and a new patterning process used with an increasing amount of interconnect levels will not be a viable solution. After copper metallization with atomic-scale liners and dielectrics with κ<1.8, conventional approaches are not compatible with the performance needed with sub-50nm devices.

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