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Titlebook: Applied Scanning Probe Methods VIII; Scanning Probe Micro Bharat Bhushan,Harald Fuchs,Masahiko Tomitori Book 2008 Springer-Verlag Berlin He

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Applied Scanning Probe Methods VIII978-3-540-74080-3Series ISSN 1434-4904 Series E-ISSN 2197-7127
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978-3-642-09340-1Springer-Verlag Berlin Heidelberg 2008
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Book 2008includingnewselfsensingcantilever systems, combinations of AFM sensors and scanning electron and ion microscopes, calibration methods, frequency modulation AFM for application in liquids, Kelvin probe force microscopy, scanning capacitance microscopy, and the measurement of electrical transport prop
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Critical Dimension Atomic Force Microscopy for Sub-50-nm Microelectronics Technology Nodes,) multiple cross-sectional, with resolution comparable to that of transmission electron microscopy (TEM). Recently, these attributes have enhanced the role of CD AFM as the RMS for other metrology systems.
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Carbon Nanotubes as SPM Tips: Mechanical Properties of Nanotube Tips and Imaging,ntrol parameters such as radius, length, angle with the sample and anchoring are discussed. The mechanical properties of those nanotubes anchored to the tip aremodeled and experimentally probed by dynamical atomic force microscopy in frequency modulation mode. Most of the nanotube mechanical behavio
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