书目名称 | Wafer Bonding |
副标题 | Applications and Tec |
编辑 | Marin Alexe,Ulrich Gösele |
视频video | |
概述 | Presents the current state of the art in wafer bonding - a technology important to microelectronic device manufacturing.Includes supplementary material: |
丛书名称 | Springer Series in Materials Science |
图书封面 |  |
描述 | During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information. |
出版日期 | Book 2004 |
关键词 | Compound semiconductors; Diode; Helium-Atom-Streuung; MEMS; Semiconductor; Silicon-on-insulator; Wafer; Waf |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-662-10827-7 |
isbn_softcover | 978-3-642-05915-5 |
isbn_ebook | 978-3-662-10827-7Series ISSN 0933-033X Series E-ISSN 2196-2812 |
issn_series | 0933-033X |
copyright | Springer-Verlag Berlin Heidelberg 2004 |