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Titlebook: Wafer Bonding; Applications and Tec Marin Alexe,Ulrich Gösele Book 2004 Springer-Verlag Berlin Heidelberg 2004 Compound semiconductors.Diod

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书目名称Wafer Bonding
副标题Applications and Tec
编辑Marin Alexe,Ulrich Gösele
视频video
概述Presents the current state of the art in wafer bonding - a technology important to microelectronic device manufacturing.Includes supplementary material:
丛书名称Springer Series in Materials Science
图书封面Titlebook: Wafer Bonding; Applications and Tec Marin Alexe,Ulrich Gösele Book 2004 Springer-Verlag Berlin Heidelberg 2004 Compound semiconductors.Diod
描述During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.
出版日期Book 2004
关键词Compound semiconductors; Diode; Helium-Atom-Streuung; MEMS; Semiconductor; Silicon-on-insulator; Wafer; Waf
版次1
doihttps://doi.org/10.1007/978-3-662-10827-7
isbn_softcover978-3-642-05915-5
isbn_ebook978-3-662-10827-7Series ISSN 0933-033X Series E-ISSN 2196-2812
issn_series 0933-033X
copyrightSpringer-Verlag Berlin Heidelberg 2004
The information of publication is updating

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