Overview: The basic theory and design principles of Film Bulk Acoustic Resonators (FBARs).An overview of FBAR filters by covering a vast range of technologies, optimal device design, filter topologies, packagin.Mulilayer Integrated Film Bulk Acoustic Resonators. mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufac
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