Overview: First book on modelling of the processing techniques for microsystems.Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vap.This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of exper
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