Overview: Most advanced and comprehensive book on high permittivity gate dielectrics.Covers the basics, latest developments, and applications.A reference work for researchers, electrical engineers and materials."The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate sta
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