| 书目名称 | Temperature Measurement during Millisecond Annealing |
| 副标题 | Ripple Pyrometry for |
| 编辑 | Denise Reichel |
| 视频video | |
| 概述 | Publication in the field of natural sciences.Includes supplementary material: |
| 丛书名称 | MatWerk |
| 图书封面 |  |
| 描述 | .Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.. |
| 出版日期 | Book 2015 |
| 关键词 | voice coil; emissivity; mechanical oscillator; semiconductors; lamp-based annealing of semiconductors; fl |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-658-11388-9 |
| isbn_softcover | 978-3-658-11387-2 |
| isbn_ebook | 978-3-658-11388-9Series ISSN 2522-0756 Series E-ISSN 2522-0764 |
| issn_series | 2522-0756 |
| copyright | Springer Fachmedien Wiesbaden 2015 |
发表于 2025-3-21 17:49:46
