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Titlebook: Silicon-on-Insulator Technology: Materials to VLSI; Materials to VLSI Jean-Pierre Colinge Book 2004Latest edition Springer Science+Business

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SOI CMOS Technology,ors [.] but the most important consumer of SOI wafers is the CMOS integrated circuit industry. This chapter will compare CMOS processing on bulk silicon and on SOI wafers. Processing of fully and partially depleted devices will be discussed. SOI wafers contain only silicon and silicon dioxide, and t
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Other SOI Devices,of the devices and the possibility of using a back gate have led to large research activity in the field of novel SOI devices. Several different novel bipolar and MOS structures have been proposed, such as lateral bipolar and bipolar-MOS devices, vertical bipolar transistors with back gate-induced c
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Introduction,hat the first MOSFET was a Semiconductor-on-Insulator (SOI) device. The technology of that time was unfortunately unable to produce a successfully operating Lilienfield device. IGFET technology was then forgotten for a while, completely overshadowed by the enormous success of the bipolar transistor discovered in 1947 [.].
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978-1-4613-4795-8Springer Science+Business Media New York 2004
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