书目名称 | Sensor Technology in the Netherlands: State of the Art | 副标题 | Proceedings of the D | 编辑 | A. Berg,P. Bergveld | 视频video | | 图书封面 |  | 描述 | In the rapidly developing information society there is anever-growing demand for information-supplying elements or sensors. Thetechnology to fabricate such sensors has grown in the past few decadesfrom a skilful activity to a mature area of scientific research andtechnological development. In this process, the use of silicon-basedtechniques has appeared to be of crucial importance, as it introducedstandardized (mass) fabrication techniques, created the possibility ofintegrated electronics, allowed for new transduction principles, andenabled the realization of micromechanical structures for sensing oractuation. Such micromechanical structures are particularlywell-suited to realize complex microsystems that improve theperformance of individual sensors. Currently, a variety of sensorareas ranging from optical to magnetic and from micromechanical to(bio)chemical sensors has reached a high level of sophistication..In this MESA Monograph the proceedings of the Dutch Sensor Conference,an initiative of the Technology Foundation (STW), held at theUniversity of Twente on March 2-3, 1998, are compiled. Itcomprises all the oral and poster contributions of the conference, andgives an excellent | 出版日期 | Conference proceedings 1998 | 关键词 | CMOS; Multiplexer; SQUID; Sensor; Standard; Transistor; electronics; field-effect transistor; integrated cir | 版次 | 1 | doi | https://doi.org/10.1007/978-94-011-5010-1 | isbn_softcover | 978-94-010-6103-2 | isbn_ebook | 978-94-011-5010-1 | copyright | Springer Science+Business Media Dordrecht 1998 |
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