书目名称 | Scanning Electron Microscopy |
副标题 | Physics of Image For |
编辑 | Ludwig Reimer |
视频video | |
丛书名称 | Springer Series in Optical Sciences |
图书封面 |  |
描述 | The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec tron beam can be blanked at high frequencies for time-resolving exper iments and what problems have tobe taken into account when focusing. |
出版日期 | Book 19851st edition |
关键词 | Rasterelektronen Mikroskopie; Scanning Tunneling Microscopy; ASTER; crystal; diffraction; electron; electr |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-662-13562-4 |
isbn_ebook | 978-3-662-13562-4Series ISSN 0342-4111 Series E-ISSN 1556-1534 |
issn_series | 0342-4111 |
copyright | Springer-Verlag Berlin Heidelberg 1985 |