| 书目名称 | Process Variations in Microsystems Manufacturing |
| 编辑 | Michael Huff |
| 视频video | |
| 概述 | Examines and explains the basic processing steps used in MEMS fabrication.Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case stu |
| 丛书名称 | Microsystems and Nanosystems |
| 图书封面 |  |
| 描述 | This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. |
| 出版日期 | Book 2020 |
| 关键词 | MEMS; Micro-Electro-Mechanical Systems; Micro-machining; Microactuators; Microsensors; Microsystems; Micro |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-030-40560-1 |
| isbn_ebook | 978-3-030-40560-1Series ISSN 2198-0063 Series E-ISSN 2198-0071 |
| issn_series | 2198-0063 |
| copyright | Springer Nature Switzerland AG 2020 |
发表于 2025-3-21 17:33:43
