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Titlebook: Optimal Synthesis Methods for MEMS; G. K. Ananthasuresh Book 2003 Springer Science+Business Media New York 2003 Motor.Potential.Transducer

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Mask Synthesis,is shown, illustrated with examples, how this framework reduces the geometric problem of mask synthesis of surface micromachined devices to an over constrained linear system of equations that can be solved using singular value decomposition..
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System-Level Synthesis, to synthesize the transducer layout from high-level engineering specifications. A variety of objective functions can be used to automate the exploration of the entire design space given specific user-specified engineering constraints, allowing the designer to understand the complex design trade-off
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