书目名称 | Nanofabrication | 副标题 | Techniques and Princ | 编辑 | Maria Stepanova,Steven Dew | 视频video | | 概述 | Covers a wide range of emerging nanofabrication techniques.Approximately 200 figures and tables to explain the topic.Content provided by leading researchers in the field.Includes supplementary materia | 图书封面 |  | 描述 | .Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.. | 出版日期 | Book 2012 | 关键词 | nanofabrication technologies; nanolithography; nanoscale patterns; nanoscale structures; nanotechnology | 版次 | 1 | doi | https://doi.org/10.1007/978-3-7091-0424-8 | isbn_softcover | 978-3-7091-1666-1 | isbn_ebook | 978-3-7091-0424-8 | copyright | Springer-Verlag/Wien 2012 |
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