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Titlebook: Nanofabrication; Techniques and Princ Maria Stepanova,Steven Dew Book 2012 Springer-Verlag/Wien 2012 nanofabrication technologies.nanolitho

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书目名称Nanofabrication
副标题Techniques and Princ
编辑Maria Stepanova,Steven Dew
视频video
概述Covers a wide range of emerging nanofabrication techniques.Approximately 200 figures and tables to explain the topic.Content provided by leading researchers in the field.Includes supplementary materia
图书封面Titlebook: Nanofabrication; Techniques and Princ Maria Stepanova,Steven Dew Book 2012 Springer-Verlag/Wien 2012 nanofabrication technologies.nanolitho
描述.Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years..
出版日期Book 2012
关键词nanofabrication technologies; nanolithography; nanoscale patterns; nanoscale structures; nanotechnology
版次1
doihttps://doi.org/10.1007/978-3-7091-0424-8
isbn_softcover978-3-7091-1666-1
isbn_ebook978-3-7091-0424-8
copyrightSpringer-Verlag/Wien 2012
The information of publication is updating

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