| 书目名称 | Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration | | 编辑 | J. Laconte,D. Flandre,J. -P. Raskin | | 视频video | | | 概述 | Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated here.The impact of Micromachining on SOI devices is deeply analyzed for the first time.Include extensive TMAH etchin | | 图书封面 |  | | 描述 | .Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost...Micromachined Thin-Film Sensors for SOI-CMOS Co-integration .covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology...We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated...The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemen | | 出版日期 | Book 2006 | | 关键词 | CMOS; Co-integration; Gas-flow sensors; REM; Silicon-on-Insulator; TMAH released membranes; Thin-films res | | 版次 | 1 | | doi | https://doi.org/10.1007/0-387-28843-0 | | isbn_softcover | 978-1-4419-3957-9 | | isbn_ebook | 978-0-387-28843-7 | | copyright | Springer-Verlag US 2006 |
The information of publication is updating
|
|
发表于 2025-3-21 18:58:40
