书目名称 | Microactuators, Microsensors and Micromechanisms | 副标题 | MAMM 2020 | 编辑 | Lena Zentner,Steffen Strehle | 视频video | | 概述 | Brings together researchers in all areas of microsystems technology, with a focus on micro-actuators and micro-mechanisms.Provides a forum for researchers in MEMS, precision machining, compliant mecha | 丛书名称 | Mechanisms and Machine Science | 图书封面 |  | 描述 | .This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. .The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. . .The conference was organized underthe patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).. | 出版日期 | Conference proceedings 2021 | 关键词 | MEMS; Microsystems; Microfabrication; Microassembly; Compliant mechanisms; Micromanipulation; IFToMM; MAMM | 版次 | 1 | doi | https://doi.org/10.1007/978-3-030-61652-6 | isbn_softcover | 978-3-030-61654-0 | isbn_ebook | 978-3-030-61652-6Series ISSN 2211-0984 Series E-ISSN 2211-0992 | issn_series | 2211-0984 | copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerl |
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