书目名称 | Micro and Nano Machined Electrometers |
编辑 | Yong Zhu |
视频video | http://file.papertrans.cn/633/632728/632728.mp4 |
概述 | Reviews the latest advances in micro- and nano-electrometers.Discusses the technological challenges involved in their practical implementation.Explores a broad range of applications, e.g. scanning tun |
图书封面 |  |
描述 | .This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.. |
出版日期 | Book 2020 |
关键词 | Mesoscopic SET electrometer; NEMS electrometer; MEMS electrometer; Vibrating-reed electrometer; charge s |
版次 | 1 |
doi | https://doi.org/10.1007/978-981-13-3247-0 |
isbn_ebook | 978-981-13-3247-0 |
copyright | Springer Nature Singapore Pte Ltd. 2020 |