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Titlebook: Micro and Nano Machined Electrometers; Yong Zhu Book 2020 Springer Nature Singapore Pte Ltd. 2020 Mesoscopic SET electrometer.NEMS electro

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发表于 2025-3-21 16:34:00 | 显示全部楼层 |阅读模式
书目名称Micro and Nano Machined Electrometers
编辑Yong Zhu
视频video
概述Reviews the latest advances in micro- and nano-electrometers.Discusses the technological challenges involved in their practical implementation.Explores a broad range of applications, e.g. scanning tun
图书封面Titlebook: Micro and Nano Machined Electrometers;  Yong Zhu Book 2020 Springer Nature Singapore Pte Ltd. 2020 Mesoscopic SET electrometer.NEMS electro
描述.This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors..
出版日期Book 2020
关键词Mesoscopic SET electrometer; NEMS electrometer; MEMS electrometer; Vibrating-reed electrometer; charge s
版次1
doihttps://doi.org/10.1007/978-981-13-3247-0
isbn_ebook978-981-13-3247-0
copyrightSpringer Nature Singapore Pte Ltd. 2020
The information of publication is updating

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Micromachined Resonant Electrometers, frequency modulation type resonant electrometers have merits of high resolution and large dynamic range. Fundamentals of vibration system is firstly introduced, including resonance of a beam resonator. Oscillations of the resonator with closed loop methods are introduced to obtain and track resonan
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Micro Electrometers Based on Micromachined Time-Modulated Variable Capacitors, a period prior to the availability of microfabrication technology and techniques. This chapter shows how microfabrication technology, when aptly applied to older concepts that were previously realized using conventional machining techniques, can provide significant advancements in performance. This
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