Titlebook: Micro and Nano Fabrication Technology; Jiwang Yan Living reference work 20200th edition Micro and Nano Fabrication Technology.Nano medici

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Femtosecond Laser Direct Writing,ial to maximize the outcome of femtosecond LDW. In this chapter, femtosecond LDW is described for both subtractive and additive material processing, starting with the fundamentals to understand the processing characteristics. Advantages and capabilities of femtosecond LDW are described with reference to recent studies.

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Microfabrication by Laser Lithography Combined with Ion Etching,er, the replication process of microstructures from glass substrate to ultrathin polymer membrane was also developed to lower the manufacturing cost for meeting the needs of mass production. The developed technologies could be utilized to fabricate large-aperture diffractive optical elements in a variety of future applications.

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2522-5065 d methodologies.Intended for not only specialists in this fiThis volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical metho

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Bonnet Polishing of Microstructured Surface,ishing is presented. The material removal characteristics and tool influence function of bonnet polishing are explained, and a multi-scale material removal model and a surface generation model were developed. Surface generation of microstructures by single precess polishing and swing precess polishi

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Catalytic AFM-Based Nanofabrication, direct and resistless nanoscale patterning and structuring of various organic/inorganic materials. This chapter focuses on the principles and methods of catalytic AFM-based nanofabrication, challenges in its developments, and the possible solutions.

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Elliptical Vibration Cutting for Difficult-to-Cut Materials,de machining of brittle materials, e.g., tungsten carbide, can be realized by the elliptical vibration cutting for not only plane surfaces but also textured surfaces which is difficult to be obtained from other cutting methods. High-efficiency mirror surface finishing of hardened die steel is also r

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Laser Patterning of Metallic Glass,and its recent achievement and development will be addressed. The surface structures patterned by single nanosecond pulsed laser irradiation as well as line laser irradiation under various experimental parameters and environmental atmospheres will be introduced, and their formation mechanisms will b

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