Titlebook: MEMS and Nanotechnology, Volume 6; Proceedings of the 2 Gordon A. Shaw,Barton C. Prorok,LaVern A. Starman Conference proceedings 2013 The S

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Opto-Mechanical Characterization of a MEMS Sensor for Real-Time Infrared Imaging,ged detector with responsivity of 2.4 nm/K are made with a Linnik interferometer employing the four phase step technique. The interferometer can measure real-time, full-field height variations across the array. In double-exposure mode, the current height map is subtracted from a reference image so t

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978-1-4899-9515-5The Society for Experimental Mechanics, Inc. 2013

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