| 书目名称 | Low-Energy Ion Irradiation of Solid Surfaces |
| 编辑 | Hubert Gnaser |
| 视频video | |
| 概述 | Up-to-date overview of the field.Critical review of the literature available |
| 丛书名称 | Springer Tracts in Modern Physics |
| 图书封面 |  |
| 描述 | The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches. |
| 出版日期 | Book 1999 |
| 关键词 | molecule; semiconductor; semiconductors; surface |
| 版次 | 1 |
| doi | https://doi.org/10.1007/BFb0110693 |
| isbn_softcover | 978-3-662-14739-9 |
| isbn_ebook | 978-3-540-49773-8Series ISSN 0081-3869 Series E-ISSN 1615-0430 |
| issn_series | 0081-3869 |
| copyright | Springer-Verlag Berlin Heidelberg 1999 |
发表于 2025-3-21 16:20:51
