Titlebook: Levitation Micro-Systems; Applications to Sens Kirill Poletkin Book 2021 The Editor(s) (if applicable) and The Author(s), under exclusive l

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Analytical Modelling,To fully benefit from inductive levitation and utilize its advantages in L-micro-systems such as

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Hybrid Levitation Micro-Systems,In this chapter, applications of hybrid levitation micro-systems based on a combination of electric and inductive force fields to micro-actuators, micro-accelerators and micro-accelerometers are discussed.

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Micro-Coil Fabrication Techniques,coil design [.]. An alternative coil design in the shape of a rectangular spiral, which also provides stable levitation, was employed in the micro-gyroscope prototype reported by the Tsai group in work [.].

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Quasi-finite Element Modelling, The combination of finite element manner to calculate induced eddy current and the set of six differential equations describing the behaviour of the mechanical part of electromagnetic levitation system is the resulting essence of the proposed quasi-finite element approach to simulate IL-micro-systems.

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