书目名称 | Levitation Micro-Systems |
副标题 | Applications to Sens |
编辑 | Kirill Poletkin |
视频video | |
概述 | Provides several known methods including a jet of gas, intense acoustic waves, and others.Illustrates best practices and lessons learned in Levitation.Written for experts in this field |
丛书名称 | Microsystems and Nanosystems |
图书封面 |  |
描述 | This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements. |
出版日期 | Book 2021 |
关键词 | Levitation Micro-Systems; Inductive Levitation; Electromagnetic Levitation; Micro-Fabrication Technique |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-030-58908-0 |
isbn_softcover | 978-3-030-58910-3 |
isbn_ebook | 978-3-030-58908-0Series ISSN 2198-0063 Series E-ISSN 2198-0071 |
issn_series | 2198-0063 |
copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerl |